64-3200 Series ultra high purity, high flow tied diaphragm pressure reducing regulator offers 10 Ra microinch / 0.25 micrometer surface finish and is available in Hastelloy® trim. Maximum flow rates are up to 31.8 SCFM / 900 SLPM, with inlet pressures of 150, 1000, 1500 psig / 10.3, 69.0, 103 bar and outlet pressures up to 200 psig / 13.8 bar. Ideal for use in Bulk Specialty Gas Systems (BSGS), 1/2" point-of-use, tool hook-ups and gas cabinets.

Pressure Rating

Maximum Inlet Pressure: 150, 1000, 1500 psig / 10.3, 69.0, 103 bar
Outlet Pressure Ranges: 30, 60, 100, 150, 200 psig / 2.1, 4.1, 6.9, 10.3, 13.8 bar

Body Material

316L Stainless Steel Electropolish or 316L VAR Stainless Steel Electropolish

Diaphragm

Hastelloy®

Seat Retainer

316 Stainless Steel

Poppet

316 Stainless Steel or Hastelloy®

Valve Seat

Teflon®, Vespel®, PCTFE

Remaining Parts

316 Stainless Steel

Operating Temperature

Teflon® Seat: -40 to 160°F / -40 to 71°C
Vespel® Seat: -40 to 350°F / -40 to 177°C
PCTFE Seat: -40 to 140°F / -40 to 60°C

Port Size & Type

1, 3/8, 3/4, 1/2 Tube Ends
1/4, 1/2, 3/4
Male Fixed, Male Swivel (normal and high flow), Female Swivel (normal and high flow)

Flow Capacity

Cv = 1.2

Weight (without gauges)

3.5 lbs / 1.6 kg

Additional Information

For custom modifications or a complete system solution, please contact your local sales office.