64-3600 Series ultra high purity, highly sensitive pressure reducing regulator offers a low droop, tied diaphragm design, 10 Ra / 0.25 micrometer surface finish with available Hastelloy® trim. Inlet pressures are 600 or 3500 psig / 41.4 or 241 bar with outlet pressure up to 150 psig / 10.3 bar. Ideal for use in 1/4" point-of-use, gas cabinets, semiconductor manufacturing and valve manifold boxes.

Pressure Rating

Maximum Inlet Pressure: 600 or 3500 psig / 41.4 or 241 bar
Outlet Pressure Ranges: 30, 60, 100, 150 psig / 2.1, 4.1, 6.9, 10.3 bar

Body Material

316L Stainless Steel Electropolish or 316L VAR Stainless Steel Electropolish

Diaphragm

Hastelloy®

Valve Seat

PCTFE, Teflon PFA® or Vespel®

Stem & Valve Spring

316 Stainless Steel

Remaining Parts

316 Stainless Steel or Hastelloy®

Operating Temperature

Teflon® PFA Seat: -40 to 160°F / -40 to 71°C
Vespel® Seat: -40 to 350°F / -40 to 177°C
PCTFE Seat: -40 to 140°F / -40 to 60°C

Port Size & Type

1/4, 1/2
Male Swivel, Female Swivel, Male Fixed, HPIC
1/4 Tube Stubs

Flow Capacity

Cv = 0.15 or 0.06

Weight

2 lbs / 0.9 kg

Additional Information

For custom modifications or a complete system solution, please contact your local sales office.