64-5000 Series ultra high purity, absolute / subatmospheric pressure reducing regulator offers a 10 Ra surface finish. Inlet pressures are 120, 600, or 3500 psig / 8.3, 41.4, or 241 bar with outlet pressures ranges from 50 mm Hg absolute - 15 to 100 psig / 50 mm Hg absolute - 1.0 to 6.9 bar. Ideal for use in vacuum pressures control, toxic gas analysis, valve manifold boxes, gas cabinets and semiconductor manufacturing.

Pressure Rating

Maximum Inlet Pressure: 120, 600, or 3500 psig / 8.3, 41.4, or 241 bar
Outlet Pressure Ranges: 50 mm Hg absolute -
15, 30, 60, 100 psig / 1.0, 2.1, 4.1, 6.9 bar

Body Material

316L Stainless Steel Electropolish or 316L VAR Stainless Steel Electropolish

Valve Seat

Teflon®, PCTFE

Diaphragm

316L Stainless Steel

Valve Stem, Spring & Valve Guide

316 Stainless Steel

Operating Temperature

Teflon® Seat: -40°F to 160°F / -40°C to 71°C
PCTFE Seat: -40°F to 140°F / -40°C to 60°C

Port Size & Type

1/4 H.P.I.C.
1/4, 1/2 Male Swivel
1/4, 1/2 Female Swivel
IN Port: 1/4 Male; OUT Port: 1/4 Female
IN Port: 1/4 Female; OUT Port: 1/4 Male
1/4 Tube Stubs

Flow Capacity

Cv = 0.24 (120 psig / 8.3 bar model)
Cv = 0.15 (600 psig / 41.4 bar model)
Cv = 0.06 (3500 psig / 241 bar model)

Weight

2 lbs / 0.9 kg

Additional Information

For custom modifications or a complete system solution, please contact your local sales office.